Global Group
MappIR
. 반도체 웨이퍼 매핑 분석용 완전 자동화된 악세사리
. EPI, BPSG, 산소 및 탄소용 정반사, 투과 샘플링
. 최대 직경 8" (200mm) 까지의 웨이퍼 수용
. 맞춤형 웨이퍼 마운트 가능
. AutoPROTM 소프트웨어를 사용하여 R-theta 또는 Cartesian 좌표로 정밀 모션을 프로그래밍 할 수 있음
기본구성
. 1001628XX MappIR Accessory for 8" wafers includes wafer mount, motion control unit, AutoPRO software and mount for your FTIR
. 1001629XX Purge-Ready MappIR Wafer Accessory for 8" Wafers includes wafer mount, motion control unit, AutoPRO software and mount for your FTIR (order purge enclosure separately)
선택구성
. Options for the MappIR and MAP300 Accessories
Part Number |
Description |
100733880 |
Additional 8" Wafer Mount (MappIR only) |
100733800 |
Blank Support-for custom wafers (MappIR only) |
100173912 |
Additional 12" Wafer Mount (MAP300 only) |
100173980 |
Insert to Support 8" Wafer (MAP300 only) |
100733860 |
Insert to Support 6" Wafer |
100733850 |
Insert to Support 5" Wafer |
100733840 |
Insert to Support 4" Wafer |
100733830 |
Insert to Support 3" Wafer |
100733820 |
Insert to Support 2" Wafer |
100163000 |
Purge Enclosure for MappIR |
100173000 |
Purge Enclosure for MAP300 |